Infrared spectroscopic ellipsometry for biomolecular materials characterization

被引：0
|
作者：
不详
机构：
来源：
JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY | 1999年 / 104卷 / 01期
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：123 / 123
页数：1
相关论文
共 50 条
  • [21] Infrared spectroscopic ellipsometry applied to the characterization of ultra shallow junction on silicon and SOI
    Defranoux, C
    Emeraud, T
    Bourtault, S
    Venturini, J
    Boher, P
    Hernandez, M
    Laviron, C
    Noguchi, I
    THIN SOLID FILMS, 2004, 455 : 150 - 156
  • [22] NONDESTRUCTIVE CHARACTERIZATION OF SILICON-ON-INSULATOR STRUCTURES USING INFRARED SPECTROSCOPIC ELLIPSOMETRY
    FERRIEU, F
    DUTARTRE, D
    JOURNAL OF APPLIED PHYSICS, 1990, 68 (11) : 5810 - 5813
  • [23] Application of Spectroscopic Ellipsometry and Mueller Ellipsometry to Optical Characterization
    Garcia-Caurel, Enric
    De Martino, Antonellc
    Gaston, Jean-Paul
    Yan, Li
    APPLIED SPECTROSCOPY, 2013, 67 (01) : 1 - 21
  • [24] Materials characterization by ellipsometry
    Polovinkin, VG
    Baklanov, MR
    MATERIALS FOR INFORMATION TECHNOLOGY: DEVICES, INTERCONNECTS AND PACKAGING, 2005, : 461 - 473
  • [25] Spectroscopic ellipsometry and reflectance anisotropy spectroscopy of biomolecular layers on silicon surfaces
    Zahn, DRT
    Silaghi, SD
    Cobet, C
    Friedrich, M
    Esser, N
    PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2005, 242 (13): : 2671 - 2680
  • [26] EXTENSION OF SPECTROSCOPIC ELLIPSOMETRY TO THE FAR-INFRARED
    DITTMAR, G
    OFFERMANN, V
    POHLEN, M
    GROSSE, P
    THIN SOLID FILMS, 1993, 234 (1-2) : 346 - 351
  • [27] CHARACTERIZATION OF THIN-FILMS AND MATERIALS USED IN SEMICONDUCTOR TECHNOLOGY BY SPECTROSCOPIC ELLIPSOMETRY
    FERRIEU, F
    LECAT, JH
    THIN SOLID FILMS, 1988, 164 : 43 - 50
  • [28] Study on GaN epilayer by infrared spectroscopic ellipsometry
    Wang, J
    Li, XY
    Liu, J
    Huang, ZM
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2005, 20 (06) : 540 - 543
  • [29] The use of infrared spectroscopic ellipsometry for the thickness determination and molecular characterization of thin films on aluminum
    Schram, T
    Terryn, H
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2001, 148 (02) : F12 - F20
  • [30] Characterization of ZnSe Nanolayers by Spectroscopic Ellipsometry
    Scepanovic, M.
    Grujic-Brojcin, M.
    Nesheva, D.
    Levi, Z.
    Bineva, I.
    Popovic, Z. V.
    ACTA PHYSICA POLONICA A, 2009, 116 (04) : 708 - 711
12345