CHARACTERIZATION OF THIN-FILMS AND MATERIALS USED IN SEMICONDUCTOR TECHNOLOGY BY SPECTROSCOPIC ELLIPSOMETRY

被引：8
|
作者：
FERRIEU, F [1 ]
LECAT, JH [1 ]
机构：
[1] SOPRA,F-92270 BOIS COLOMBES,FRANCE
来源：
THIN SOLID FILMS | 1988年 / 164卷
关键词：
Anisotropic Disilicides - Bulk Materials - Hadamard Transform - Heavy Ions - Spectroscopic Ellipsometry;
D O I：
10.1016/0040-6090(88)90107-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
(Edited Abstract)
引用
收藏
页码：43 / 50
页数：8
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