ELLIPSOMETRY - A METHOD FOR THE CHARACTERIZATION OF THIN-FILMS

被引：4

|

作者：

HALLER, W

机构：

来源：

BERICHTE DER BUNSEN-GESELLSCHAFT-PHYSICAL CHEMISTRY CHEMICAL PHYSICS | 1981年 / 85卷 / 10期

关键词：

D O I：

10.1002/bbpc.19810851007

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

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页码：847 / 851

页数：5

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