Effect of temperature increase on performance of a multilayer Mo/Si interference mirror in the X-ray range

被引：2
|
作者：
André, JM
Barchewitz, R
Bridou, F
Pardo, B
Bac, S
Greiner, V
Troussel, P
机构：
[1] Univ Paris 06, Chim Phys Lab, Grp Opt X, CNRS,UA 176, F-75231 Paris 05, France
[2] Lab Utilisat Rayonnement Electromagnet, F-91405 Orsay, France
[3] Univ Paris Sud, Inst Opt Theor & Appliquee, CNRS, UA 14, F-91405 Orsay, France
[4] Ctr Etud Bruyeres Le Chatel, CEA,DAM, DRIF,DCRE, SDE, F-91680 Bruyeres Le Chatel, France
来源：
JOURNAL DE PHYSIQUE IV | 1998年 / 8卷 / P5期
关键词：
D O I：
10.1051/jp4:1998557
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
We studied the effect of an increase of temperature on the optical performances, in the X-ray range, of an interferential multilayer mirror Mo/Si. The multilayer stack made by magnetron sputtering was annealed at different temperatures between the room temperature and 500 degrees C. We observed a decrease of the period, a notable decrease of the "peak reflectivity" together with a broadening of the bandpass and a structural alteration. These effects are interpreted as the consequence of the formation of an interfacial layer cristallized in the form of hexagonal MoSi2.
引用
收藏
页码：453 / 457
页数：5
相关论文
共 50 条
  • [21] Ion beam sputter deposition of soft x-ray Mo/Si multilayer mirrors
    Schubert, E
    Frost, F
    Ziberi, B
    Wagner, G
    Neumann, H
    Rauschenbach, B
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2005, 23 (03): : 959 - 965
  • [22] Improvement of the Microstructure and X-ray Performance of Ultrathin Ru/C Multilayer Mirror after High Temperature Treatment
    Liu, Yang
    Huang, Qiushi
    Qi, Runze
    Xiao, Liangxing
    Zhang, Zhong
    Wang, Zhanshan
    COATINGS, 2021, 11 (01) : 1 - 12
  • [23] Thermal stability of Mo/C/Si/C multilayer soft x-ray mirrors
    Takenaka, H
    Kawamura, T
    JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1996, 80 : 381 - 384
  • [24] Structural characterization of a Mo/Si multilayer reflector by means of x-ray diffraction measurements
    Kim, DE
    Cha, DH
    Lee, SW
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1997, 15 (04): : 2291 - 2296
  • [25] A multilayer x-ray mirror in the form of an ellipsoid of revolution
    A. A. Akhsakhalyan
    A. D. Akhsakhalyan
    E. B. Klyuenkov
    V. A. Murav’ev
    N. N. Salashchenko
    A. I. Kharitonov
    Bulletin of the Russian Academy of Sciences: Physics, 2007, 71 (1) : 64 - 67
  • [26] ENHANCEMENT OF THE REFLECTIVITY OF MO/SI MULTILAYER X-RAY MIRRORS BY THERMAL-TREATMENT
    KLOIDT, A
    NOLTING, K
    KLEINEBERG, U
    SCHMIEDESKAMP, B
    HEINZMANN, U
    MULLER, P
    KUHNE, M
    APPLIED PHYSICS LETTERS, 1991, 58 (23) : 2601 - 2603
  • [27] X-RAY MIRROR WITH A WIDENED ANGULAR RANGE
    VALIEV, KA
    VELIKOV, LV
    DOLGIKH, VT
    KALNOV, VA
    PROTOPOPOV, VV
    IMAMOV, RM
    LEBEDEV, OI
    LOMOV, AA
    RODDATIS, VV
    KRISTALLOGRAFIYA, 1995, 40 (02): : 358 - 363
  • [28] Multilayer mirror based soft x-ray spectrometer as a high temperature plasma diagnostic
    Duorah, S
    Ejiri, A
    Lee, S
    Iguchi, H
    Fujisawa, A
    Kojima, M
    Matsuoka, K
    Ishiyama, E
    Hanada, K
    Shiraiwa, S
    Toyama, H
    Takase, Y
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2001, 72 (01): : 1183 - 1187
  • [29] In situ x-ray reflectivity study of swift heavy ion induced interface modification in a W/Si multilayer x-ray mirror
    Potdar, Satish
    Gupta, Ranjeeta
    Gupta, Ajay
    Kulriya, Pawan Kumar
    Avasthi, D. K.
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2015, 48 (01)
  • [30] Status and limitations of multilayer X-ray interference structures
    Kortright, JB
    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1996, 156 (1-3) : 271 - 275
12345