Dependence on the sample width of signals from a near-field optical microscope

被引:1
|
作者
Kiguchi, M
Kato, M
Shimano, T
Umeda, M
Nakamura, S
Nishi, Y
Igai, M
Yamada, S
机构
[1] Hitachi Ltd, Cent Res Lab, Kokubunji, Tokyo 1858601, Japan
[2] Hitachi Ltd, Adv Res Lab, Hatoyama, Saitama 3500395, Japan
[3] Hitachi ULSI Syst Co Ltd, Kokubunji, Tokyo 1858601, Japan
关键词
D O I
10.1364/AO.40.003684
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We numerically investigated signals from a scanning near-field optical microscope (NOM) for samples of various sizes by using the finite-difference time-domain method. Under the usual conditions that apply to detection, the signal intensity depends on the width of the sample, even though the sample will be wider than the wavelength, which is much larger than the aperture, i.e., the lateral resolution of the NOM. This is an obstacle to measuring the local optical constant of samples by means of obtaining the signal intensity. When waves propagating in all directions are collected, this dependence on the sample width is reduced. The whole angle detection is important for observing the distribution of the optical constants. (C) 2001 Optical Society of America.
引用
收藏
页码:3684 / 3687
页数:4
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