Sensitivity maximized near-field scanning optical microscope with dithering sample stage

被引:2
|
作者
Park, Kyoung-Duck [1 ]
Lee, Seung Gol [2 ]
Heo, Chaejeong [3 ,4 ]
Lee, Young Hee [3 ,4 ]
Jeong, Mun Seok [1 ]
机构
[1] Gwangju Inst Sci & Technol, Adv Photon Res Inst, Kwangju 500712, South Korea
[2] Inha Univ, Dept Informat & Commun, Inchon 402751, South Korea
[3] Sungkyunkwan Univ, Sungkyunkwan Adv Inst Nanotechnol, WCU Dept Energy Sci, Suwon 440746, South Korea
[4] Sungkyunkwan Univ, Sungkyunkwan Adv Inst Nanotechnol, Dept Phys, Suwon 440746, South Korea
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 2012年 / 83卷 / 09期
基金
新加坡国家研究基金会;
关键词
ATOMIC-FORCE MICROSCOPY; INGAN/GAN QUANTUM-WELLS; QUARTZ TUNING FORK; WAVE-GUIDES; PROBE; PHOTOLUMINESCENCE; SPECTROSCOPY; LITHOGRAPHY; PROPAGATION; FEEDBACK;
D O I
10.1063/1.4754290
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We developed a new scheme for a higher sensitivity near-field scanning optical microscope (NSOM) by using a dithering sample stage rather than a dithering probe for the constant gap control between probe and sample. In a conventional NSOM, which use tip dithering feedback mechanism, the Q factor drastically decreases from 7783 to 1000 (13%) or even to 100 (1%) because harmonic oscillating characteristic is deteriorated owing to the large change of stiffness and mass of one prong of tuning fork when a probe is attached to it. In our proposed scheme, on the other hand, we use sample dithering feedback mechanism, where the probe is not attached to the tuning fork and the sample is loaded directly onto the surface of dithering tuning fork. Thus, the Q factor does not decrease significantly, from only 7783 to 7480 (96%), because the loaded sample hardly changes the stiffness and mass of tuning fork. Accordingly, gap control between the immobile fiber probe and the dithering sample is performed precisely by detecting the shear force with high sensitivity. Consequently, the extremely high Q factor enables clear observation of graphene sheets with sub-nanometer vertical resolution, which is not possible with a conventional NSOM setup. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4754290]
引用
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页数:5
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