Dynamic properties of PZT thick films structured on Si membrane by the aerosol deposition method

被引：0

作者：

Lebedev, M ^{[1
]}

Akedo, J ^{[1
]}

Akiyama, Y ^{[1
]}

机构：

[1] Minist Int Trade & Ind, AIST, Mech Engn Lab, Tsukuba, Ibaraki 3058564, Japan

来源：

PROCEEDINGS OF THE 2001 12TH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS, VOLS I AND II | 2001年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The results of the direct deposition of lead zirconate titanate [Pb(Zr-0.52, Ti-0.48)O-3] (PZT) thick film on a Si based structure are presented. The dynamic actuation properties of PZT on the Si membrane were investigated. For a 7.5 x 7.5 mm(2), 170-mum-thick Si membrane driven by a 4.7 x 4.3 mm(2), 40-mum-thick PZT layer, the deflection and pumping force, which were 1.6 mum and 6.5 kPa, respectively, upon applying 100 V at nonresonance frequency 100 Hz were measured.

引用

页码：455 / 458

页数：4

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