Dynamic properties of PZT thick films structured on Si membrane by the aerosol deposition method

被引：0
|
作者：
Lebedev, M [1 ]
Akedo, J [1 ]
Akiyama, Y [1 ]
机构：
[1] Minist Int Trade & Ind, AIST, Mech Engn Lab, Tsukuba, Ibaraki 3058564, Japan
来源：
PROCEEDINGS OF THE 2001 12TH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS, VOLS I AND II | 2001年
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D O I：
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The results of the direct deposition of lead zirconate titanate [Pb(Zr-0.52, Ti-0.48)O-3] (PZT) thick film on a Si based structure are presented. The dynamic actuation properties of PZT on the Si membrane were investigated. For a 7.5 x 7.5 mm(2), 170-mum-thick Si membrane driven by a 4.7 x 4.3 mm(2), 40-mum-thick PZT layer, the deflection and pumping force, which were 1.6 mum and 6.5 kPa, respectively, upon applying 100 V at nonresonance frequency 100 Hz were measured.
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页码：455 / 458
页数：4
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