Structural Characterization of a Short-Period Superlattice Based on the CdF2/CaF2/Si(111) Heterostructure by Transmission Electron Microscopy and X-Ray Diffractometry

被引:0
|
作者
Sorokin, L. M. [1 ]
Kyutt, R. N. [1 ]
Ratnikov, V. V. [1 ]
Kalmykov, A. E. [1 ]
机构
[1] Russian Acad Sci, Ioffe Phys Tech Inst, St Petersburg 194021, Russia
关键词
superlattice; CdF2; CaF2; transmission electron microscopy; X-ray diffractometry; CDF2-CAF2; SUPERLATTICES; MBE-GROWTH; CONDUCTIVITY;
D O I
10.1134/S1063785021080125
中图分类号
O59 [应用物理学];
学科分类号
摘要
A detailed study of the structure of a short-period superlattice based on alternating layers of cadmium and calcium fluorides grown by molecular beam epitaxy on a silicon substrate (111) by transmission electron microscopy and X-ray diffractometry has been performed. It has been established that the superlattice is in a pseudomorphic state and a lateral inhomogeneity with a fragment size of 10-40 nm has been found. The reason for the broadening of the main and satellite peaks of the superlattice on the diffraction curve (111) has been elucidated.
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页码:893 / 896
页数:4
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