Structural Characterization of a Short-Period Superlattice Based on the CdF2/CaF2/Si(111) Heterostructure by Transmission Electron Microscopy and X-Ray Diffractometry

被引：0
|
作者：
Sorokin, L. M. [1 ]
Kyutt, R. N. [1 ]
Ratnikov, V. V. [1 ]
Kalmykov, A. E. [1 ]
机构：
[1] Russian Acad Sci, Ioffe Phys Tech Inst, St Petersburg 194021, Russia
来源：
TECHNICAL PHYSICS LETTERS | 2021年 / 47卷 / 12期
关键词：
superlattice; CdF2; CaF2; transmission electron microscopy; X-ray diffractometry; CDF2-CAF2; SUPERLATTICES; MBE-GROWTH; CONDUCTIVITY;
D O I：
10.1134/S1063785021080125
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A detailed study of the structure of a short-period superlattice based on alternating layers of cadmium and calcium fluorides grown by molecular beam epitaxy on a silicon substrate (111) by transmission electron microscopy and X-ray diffractometry has been performed. It has been established that the superlattice is in a pseudomorphic state and a lateral inhomogeneity with a fragment size of 10-40 nm has been found. The reason for the broadening of the main and satellite peaks of the superlattice on the diffraction curve (111) has been elucidated.
引用
收藏
页码：893 / 896
页数：4
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