Capacitive nanoelectromechanical switch based on suspended carbon nanotube array

被引：30

作者：

Acquaviva, D. ^{[1
]}

Arun, A. ^{[1
]}

Esconjauregui, S. ^{[2
]}

Bouvet, D. ^{[1
]}

Robertson, J. ^{[2
]}

Smajda, R. ^{[3
]}

Magrez, A. ^{[3
,4
]}

Forro, L. ^{[3
]}

Ionescu, A. M. ^{[1
]}

机构：

[1] Ecole Polytech Fed Lausanne, Nanolab, CH-1015 Lausanne, Switzerland

[2] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England

[3] Ecole Polytech Fed Lausanne, LPMC, CH-1015 Lausanne, Switzerland

[4] Ecole Polytech Fed Lausanne, CREAM, CH-1015 Lausanne, Switzerland

来源：

APPLIED PHYSICS LETTERS | 2010年 / 97卷 / 23期

关键词：

MEMORY;

D O I：

10.1063/1.3525165

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We present the fabrication and high frequency characterization of a capacitive nanoelectromechanical system (NEMS) switch using a dense array of horizontally aligned single-wall carbon nanotubes (CNTs). The nanotubes are directly grown onto metal layers with prepatterned catalysts with horizontal alignment in the gas flow direction. Subsequent wetting-induced compaction by isopropanol increases the nanotube density by one order of magnitude. The actuation voltage of 6 V is low for a NEMS device, and corresponds to CNT arrays with an equivalent Young's modulus of 4.5-8.5 GPa, and resistivity of under 0.0077 Omega.cm. The high frequency characterization shows an isolation of -10 dB at 5 GHz. (C) 2010 American Institute of Physics. [doi:10.1063/1.3525165]

引用

页数：3

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