Progress in carbon nanotube based nanoelectromechanical systems synthesis

被引：1

作者：

Jungen, Alain ^{[1
]}

Durrer, Lukas ^{[1
]}

Stampfer, Christoph ^{[1
]}

Roman, Cosmin ^{[1
]}

Hierold, Christofer ^{[1
]}

机构：

[1] Swiss Fed Inst Technol, CH-8092 Zurich, Switzerland

来源：

PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS | 2007年 / 244卷 / 11期

关键词：

D O I：

10.1002/pssb.200776164

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

We present a revised process flow for the integration of individual single-walled carbon nanotubes into microelectromechanical systems. The revision consists in a re-ordered process sequence which considerably increases the device yield. Thermal catalytic chemical vapor deposition of single-walled carbon nanotubes is performed conjunctly with annealing as the very last process step. Maskless catalyst deposition is demonstrated to produce individual single-walled carbon nanotubes with good location and orientation control by shaping the catalyst support. Straining experiments showed that the mechanical anchoring between the tube and the support can be sufficient. (c) 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

引用

页码：4323 / 4326

页数：4

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