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- [32] Effect of substrate pretreatments on the atomic layer deposited Al2O3 passivation quality JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2015, 33 (01):
- [36] Interface State Density of Atomic Layer Deposited Al2O3 on β-Ga2O3 WIDE BANDGAP SEMICONDUCTOR MATERIALS AND DEVICES 19, 2018, 85 (07): : 27 - 30
- [40] Si Surface Passivation by Atomic Layer Deposited Al2O3 with In-Situ H2O Prepulse Treatment Transactions on Electrical and Electronic Materials, 2019, 20 : 359 - 363