Structural investigations of sputtered thin films with X-ray absorption techniques

被引：0
|
作者：
Lutzenkirchen-Hecht, D [1 ]
Kramer, A [1 ]
Hammer, H [1 ]
Frahm, R [1 ]
机构：
[1] Univ Dusseldorf, Inst Angew Phys, D-40225 Dusseldorf, Germany
来源：
TRENDS AND NEW APPLICATIONS OF THIN FILMS | 1998年 / 287-2卷
关键词：
EXAFS; sputter deposition; Ag; NbN; atomic short range order;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The extended X-ray absorption fine structure technique (EXAFS) in the reflection mode was used for ex situ investigation of sputter deposited thin films on float glass substrates. We show that a detailed analysis of the reflectivity fine structure data enables the extraction of short range order structural information such as bond distances, coordination numbers and Debye-Waller-factors. The results obtained from the evaluation of the reflectivity data will be compared to those obtained from transmission EXAFS data of the bulk reference materials.
引用
收藏
页码：357 / 360
页数：4
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