Piezoelectric AlN thin films synthesized by midfrequency dualtarget magnetron sputtering

被引：0
|
作者：
Chen, Pu [1 ]
Peng, Qi-cai [1 ]
Zhao, Bin-guang [1 ]
Zeng, Lun
Deng, Ke-qiang
Deng, Hui-zhong
Yao, De-wu
机构：
[1] Xihua Univ, Sch Mat Sci & Engn, Chengdu 610039, Peoples R China
来源：
PROCEEDINGS OF THE 5TH INTERNATIONAL CONFERENCE ON NONLINEAR MECHANICS | 2007年
关键词：
D O I：
暂无
中图分类号：
TP301 [理论、方法];
学科分类号：
081202 ;
摘要：
AIN thin films were deposited on Si(111) substrates by midfrequency dualtarget magnetron sputtering. X-ray diffraction (XRD) and atomic force microscopy (AFM) are employed to characterize the AIN thin films. In order to control structure and roughness of the films for high frequency surface acoustic wave (SAW) devices, the influences of different processing parameters were investigated. It was found that substrate temperature and annealing temperature have a great effect on the microstructure and surface morphology of the films.
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页码：1592 / 1596
页数：5
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