Optimization of InGaAs/InP p-i-n photodiode for dual axis position detection systems

被引:0
|
作者
Budianu, E [1 ]
Purica, M [1 ]
Rusu, E [1 ]
机构
[1] Natl Inst Res & Dev Microtechnol, Bucharest 72225, Romania
关键词
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中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
It is presented the optimization of a quadrant p-i-n photodiode structure on InGaAs/InP heterostructures suited for infrared laser telemetry and optical centering applications. Taking into account the influence of material characteristics and structure parameters on the photoresponse was designed and fabricated a quadrant photodiode characterized by a responsivity of 0.62 A/W for each photodetector element, a good photoresponse uniformity on active area with deviations less than 1 percent and a good position resolution obtained by minimizing the crosstalk between elements.
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页码:381 / 384
页数:4
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