Pass-Transistor Logic Circuits Based on Wafer-Scale 2D Semiconductors

被引：25

作者：

Wang, Xinyu ^{[1
]}

Chen, Xinyu ^{[1
]}

Ma, Jingyi ^{[1
]}

Gou, Saifei ^{[1
]}

Guo, Xiaojiao ^{[1
]}

Tong, Ling ^{[1
]}

Zhu, Junqiang ^{[2
]}

Xia, Yin ^{[1
]}

Wang, Die ^{[1
]}

Sheng, Chuming ^{[1
]}

Chen, Honglei ^{[1
]}

Sun, Zhengzong ^{[1
]}

Ma, Shunli ^{[1
]}

Riaud, Antoine ^{[1
]}

Xu, Zihan ^{[3
]}

Cong, Chunxiao ^{[2
]}

Qiu, Zhijun ^{[2
]}

Zhou, Peng ^{[1
]}

Xie, Yufeng ^{[1
]}

Bian, Lifeng ^{[4
]}

Bao, Wenzhong ^{[1
]}

机构：

[1] Fudan Univ, Zhangjiang Fudan Int Innovat Ctr, Sch Microelect, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China

[2] Fudan Univ, Sch Informat Sci & Engn, Shanghai 200433, Peoples R China

[3] Shenzhen Six Carbon Technol, Shenzhen 518055, Peoples R China

[4] Fudan Univ, Frontier Inst Chip & Syst, Shanghai 200433, Peoples R China

来源：

ADVANCED MATERIALS | 2022年 / 34卷 / 48期

关键词：

2D semiconductors; complementary pass-transistor logic; integrated circuits; molybdenum disulfide (MoS; (2)); pseudo-NMOS logic gates; INTEGRATED-CIRCUITS; FABRICATION;

D O I：

10.1002/adma.202202472

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

2D semiconductors, such as molybdenum disulfide (MoS2), have attracted tremendous attention in constructing advanced monolithic integrated circuits (ICs) for future flexible and energy-efficient electronics. However, the development of large-scale ICs based on 2D materials is still in its early stage, mainly due to the non-uniformity of the individual devices and little investigation of device and circuit-level optimization. Herein, a 4-inch high-quality monolayer MoS2 film is successfully synthesized, which is then used to fabricate top-gated (TG) MoS2 field-effect transistors with wafer-scale uniformity. Some basic circuits such as static random access memory and ring oscillators are examined. A pass-transistor logic configuration based on pseudo-NMOS is then employed to design more complex MoS2 logic circuits, which are successfully fabricated with proper logic functions tested. These preliminary integration efforts show the promising potential of wafer-scale 2D semiconductors for application in complex ICs.

引用

页数：7

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