Soft x-ray microscopy and EUV lithography: Imaging in the 20-40 nm regime

被引：0

作者：

Attwood, D ^{[1
]}

Anderson, E ^{[1
]}

Chao, W ^{[1
]}

Denbeaux, G ^{[1
]}

Fischer, P ^{[1
]}

Goldberg, K ^{[1
]}

Liddle, JA ^{[1
]}

Naulleau, P ^{[1
]}

Schneider, G ^{[1
]}

Goldsmith, J ^{[1
]}

Kubiak, G ^{[1
]}

Taylor, J ^{[1
]}

Sweeney, D ^{[1
]}

机构：

[1] Univ Calif Berkeley, Appl Sci & Technol Grad Grp, Berkeley, CA 94720 USA

来源：

2003 IEEE LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1 AND 2 | 2003年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Soft x-ray microscopy for the physical and life sciences,at wavelengths from 0.6 to 4 nm, and resolved to 20 nm, and EUV lithography at 13.5 nm wavelength, with printed features-to 39 nm, are reviewed.

引用

页码：158 / 159

页数：2

共 50 条

[41] Reflectometry in soft X-ray and EUV-ranges
Bidishkin, M.S.
Zabrodin, I.G.
Zuev, S.Yu.
Klyuenkov, E.B.
Salashchenko, N.N.
Chekhonadskikh, D.P.
Chkhalo, N.I.
Shmaenok, L.A.
2003, Nauka
[42] Development of multilayer optics for EUV, soft X-ray and X-ray regions in IPOE
Wang, Z. S.
Zhu, J. T.
Wang, F. L.
Zhang, Z.
Wang, H. C.
Qin, S. J.
Chen, L. Y.
X-RAY LASERS 2006, PROCEEDINGS, 2007, 115 : 401 - +
[43] X-ray and AFM studies of ultrathin films for EUV and soft X-ray applications
Asadchikov, VE
Duparré, A
Kozhevnikov, IV
Krivonosov, YS
Sagitov, SI
ADVANCES IN OPTICAL INTERFERENCE COATINGS, 1999, 3738 : 387 - 393
[44] Soft X-ray microscopy zones in on 15 nm resolution FABRICATION & PROCESSING
Telford, Mark
MATERIALS TODAY, 2005, 8 (09) : 9 - 9
[45] Soft X-ray microscopy at a spatial resolution better than 15 nm
Weilun Chao
Bruce D. Harteneck
J. Alexander Liddle
Erik H. Anderson
David T. Attwood
Nature, 2005, 435 : 1210 - 1213
[46] Soft X-ray microscopy to 25 nm with applications to biology and magnetic materials
Denbeaux, G
Anderson, E
Chao, W
Eimüller, T
Johnson, L
Köhler, M
Larabell, C
Legros, M
Fischer, P
Pearson, A
Schültz, G
Yager, D
Attwood, D
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2001, 467 : 841 - 844
[47] SOFT X-RAY MICROSCOPY.
Kirz, Janos
Sayre, David
Nuclear instruments and methods in physics research, 1985, A246 (1-3): : 695 - 697
[48] Soft X-Ray Microscopy in Biology
Shinohara, Kunio
Ito, Atsushi
Kinjo, Yasuhito
Yamamoto, Yoshimasa
JOURNAL OF BIOMEDICAL NANOTECHNOLOGY, 2006, 2 (02) : 79 - 82
[49] Soft x-ray holographic microscopy
Stickler, Daniel
Froemter, Robert
Stillrich, Holger
Menk, Christian
Tieg, Carsten
Streit-Nierobisch, Simone
Sprung, Michael
Gutt, Christian
Stadler, Lorenz-M.
Leupold, Olaf
Gruebel, Gerhard
Oepen, Hans Peter
APPLIED PHYSICS LETTERS, 2010, 96 (04)
[50] Soft X-ray microscopy of nanomagnetism
Fischer, Peter
Kim, Dong-Hyun
Chao, Weilun
Liddle, J. Alexander
Anderson, Erik H.
Attwood, David T.
MATERIALS TODAY, 2006, 9 (1-2) : 26 - 33

← 1 2 3 4 5 →