Soft x-ray microscopy and EUV lithography: Imaging in the 20-40 nm regime

被引：0

作者：

Attwood, D ^{[1
]}

Anderson, E ^{[1
]}

Chao, W ^{[1
]}

Denbeaux, G ^{[1
]}

Fischer, P ^{[1
]}

Goldberg, K ^{[1
]}

Liddle, JA ^{[1
]}

Naulleau, P ^{[1
]}

Schneider, G ^{[1
]}

Goldsmith, J ^{[1
]}

Kubiak, G ^{[1
]}

Taylor, J ^{[1
]}

Sweeney, D ^{[1
]}

机构：

[1] Univ Calif Berkeley, Appl Sci & Technol Grad Grp, Berkeley, CA 94720 USA

来源：

2003 IEEE LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1 AND 2 | 2003年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Soft x-ray microscopy for the physical and life sciences,at wavelengths from 0.6 to 4 nm, and resolved to 20 nm, and EUV lithography at 13.5 nm wavelength, with printed features-to 39 nm, are reviewed.

引用

页码：158 / 159

页数：2

共 50 条

[21] Soft X-ray projection lithography
Kinoshita, Hiroo
Kurihara, Kenji
Takenaka, Hisataka
Mizota, Tsutomu
Haga, Tuneyuki
Ishii, Yoshikazu
NTT R and D, 1994, 43 (11): : 1221 - 1228
[22] Contrast enhancement measurements using polycapillary x-ray optics at 20-40 keV
Suparmi, C
Gibson, WM
MacDonald, CA
MEDICAL IMAGING 2001: PHYSICS OF MEDICAL IMAGING, 2001, 4320 : 163 - 171
[23] EUV/soft x-ray multilayer optics
Yulin, S
Feigl, T
Benoit, N
Kaiser, N
ADVANCED MICROLITHOGRAPHY TECHNOLOGIES, 2005, 5645 : 289 - 298
[24] Multilayers for the EUV/soft X-ray range
Schäfers, F
PHYSICA B-CONDENSED MATTER, 2000, 283 (1-3) : 119 - 124
[25] EUV and soft X-ray multilayer optics
Kaiser, N
Yulin, S
Feigl, T
Bernitzki, H
Lauth, H
ADVANCES IN OPTICAL THIN FILMS, 2003, 5250 : 109 - 118
[26] Characterization and performance of the InFOCμS 20-40 keV x-ray focusing mirror
Owens, SM
Berendse, F
Okajima, T
Misaki, K
Ogasaka, Y
Tamura, K
Tawara, Y
Kunieda, H
Chan, KW
Soong, Y
Baumgartner, WH
Krimm, H
Tueller, J
Serlemitsos, PJ
Yamashita, K
Haga, K
Ichimaru, S
Takahashi, S
Gotou, A
Kitou, H
Fukuda, S
Kamata, Y
Furuzawa, A
Akimoto, F
Yoshioka, T
Kondou, K
Haba, Y
Tanaka, T
X-RAY OPTICS FOR ASTRONOMY: TELESCOPES, MULTILAYERS, SPECTROMETERS, AND MISSIONS, 2002, 4496 : 115 - 126
[27] Scanning soft X-ray imaging at 10 nm resolution
Burge, RE
Yuan, XC
Knauer, JN
Browne, MT
Charalambous, P
ULTRAMICROSCOPY, 1997, 69 (04) : 259 - 278
[28] Soft 20-nm resolution x-ray microscopy demonstrated by use of multilayer test structures
Chao, WL
Anderson, E
Denbeaux, GP
Harteneck, B
Liddle, JA
Olynick, DL
Pearson, AL
Salmassi, F
Song, CY
Attwood, DT
OPTICS LETTERS, 2003, 28 (21) : 2019 - 2021
[29] Soft x-ray microscopy
Jacobsen, C
TRENDS IN CELL BIOLOGY, 1999, 9 (02) : 44 - 47
[30] Spherical pinch (soft X-ray/EUV) and vacuum spark (soft X-ray) for microlithography
Zhang, LY
Panarella, E
Bielawski, M
Chen, H
ELECTRON-BEAM, X-RAY, EUV, AND ION-BEAM SUBMICROMETER LITHOGRAPHIES FOR MANUFACTURING VI, 1996, 2723 : 278 - 287

← 1 2 3 4 5 →