NUMERICAL MODELING OF DAMPING CHARACTERISTICS IN A TORSIONAL MICRO-RESONATOR

The dynamic behavior of torsional micro-resonators with dimensions, 100 mu m x 20 mu m, 100 mu m x 10 mu m, 100 mu m x 5 mu m, and 100 mu m x 2.5 mu m are modeled under continuum conditions in ambient air and different liquids and at angular frequencies of 1000 Hz and 5000 Hz respectively. The dynamic response in terms of energy lost per cycle, torsional amplitude and the phase shift are calculated and non-dimensionalized suitably. Finally efforts have been made to establish a relationship between the parameters of interest and the aspect ratio.