An Effective Method for Improving Silicon Micro-resonator System Performance

被引：0
|
作者：
Xia Dunzhu
机构：
来源：
EngineeringSciences | 2006年 / 03期
关键词：
direct digital synthesis (DDS); silicon micro-resonator; AD9954; DSP;
D O I：
暂无
中图分类号：
TN389 [其他器件];
学科分类号：
摘要：
The working principle of silicon micro-resonator system was firstly introduced. An intelligent silicon micro-resonator system design and realization was presented in focus. There are two steps working flows for roughness and fine searching. Meanwhile the digital interface technology was analyzed in detail. Combined with experimental data and sweeping curve, two different searching results came out in different vacuum circumstance and its working performance was well evaluated.
引用
收藏
页码：89 / 93
页数：5
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