NUMERICAL MODELING OF DAMPING CHARACTERISTICS IN A TORSIONAL MICRO-RESONATOR

被引：0

作者：

Acharya, Tathagata ^{[1
]}

Martin, Michael J. ^{[1
]}

机构：

[1] Louisiana State Univ, Baton Rouge, LA 70803 USA

来源：

INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION - 2012, VOL 9, PTS A AND B | 2013年

关键词：

FREQUENCY; MEMS;

D O I：

暂无

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

The dynamic behavior of torsional micro-resonators with dimensions, 100 mu m x 20 mu m, 100 mu m x 10 mu m, 100 mu m x 5 mu m, and 100 mu m x 2.5 mu m are modeled under continuum conditions in ambient air and different liquids and at angular frequencies of 1000 Hz and 5000 Hz respectively. The dynamic response in terms of energy lost per cycle, torsional amplitude and the phase shift are calculated and non-dimensionalized suitably. Finally efforts have been made to establish a relationship between the parameters of interest and the aspect ratio.

引用

页码：281 / 286

页数：6

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