Gated Diode Investigation of Bias Temperature Instability in High-κ FinFETs

被引：13

作者：

Young, Chadwin D. ^{[1
]}

Neugroschel, Arnost ^{[2
]}

Matthews, Kenneth ^{[3
]}

Smith, Casey ^{[1
]}

Heh, Dawei ^{[1
]}

Park, Hokyung ^{[1
]}

Hussein, Muhammad M. ^{[1
]}

Taylor, William ^{[1
]}

Bersuker, Gennadi ^{[1
]}

机构：

[1] SEMATECH, Albany, NY 12203 USA

[2] Univ Florida, Gainesville, FL 32611 USA

[3] SVTC Technol, Austin, TX 78741 USA

来源：

IEEE ELECTRON DEVICE LETTERS | 2010年 / 31卷 / 07期

关键词：

Bias temperature instability (BTI); charge pumping; DCIV; FinFET; hafnium; high-kappa;

D O I：

10.1109/LED.2010.2049635

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Bias temperature instability (BTI) in FinFET transistors was investigated by charge-pumping (CP) and gated-diode measurements using n(+)/p(-)/p(+) structures with the gate interface identical to that in SOI-FinFETs. The results show greatly improved sensitivity for gated diode measurements than for CP. The pre-stress interface trap density was found to be N-IT congruent to 1011 cm(-2) for SiO2/2 nm-HfSiON/TiN/polySi-capped gate stacks, which is about one decade larger than in planar devices. The kinetics of Delta N-IT(t) under negative bias stress conditions (NBTI) suggests N-IT is generated by Si-H bond breaking. The mechanism for interface trap generation under positive bias stress conditions (PBTI) requires further investigation.

引用

页码：653 / 655

页数：3

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