A fractal micro-electromechanical system and its pull-in stability

被引：87
|
作者：
Tian, Dan [1 ]
He, Chun-Hui [2 ]
机构：
[1] Xian Univ Architecture & Technol, Sch Sci, Xian, Peoples R China
[2] Xian Univ Architecture & Technol, Sch Civil Engn, Xian, Peoples R China
来源：
JOURNAL OF LOW FREQUENCY NOISE VIBRATION AND ACTIVE CONTROL | 2021年 / 40卷 / 03期
关键词：
Micro-electromechanical systems; pull-in; fractal space; porous medium; fractal derivative; CALCULUS; MODEL;
D O I：
10.1177/1461348420984041
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
Pull-in instability occurs in a micro-electromechanical system, and it greatly hinders its normal operation. A fractal modification is suggested to make the system stable in all operation period. A fractal model is established using a fractal derivative, and the results show that by suitable fabrication of the micro-electromechanical system device, the pull-in instability can be converted into a novel state of pull-in stability.
引用
收藏
页码：1380 / 1386
页数：7
相关论文
共 50 条
  • [41] Thermodynamic reversible transformations in micro-electromechanical systems
    Neri, Igor
    Lopez-Suarez, Miquel
    EUROPEAN PHYSICAL JOURNAL B, 2018, 91 (06):
  • [42] Micro-electromechanical variable capacitors for RF applications
    Tsang, TKK
    El-Gamal, MN
    2002 45TH MIDWEST SYMPOSIUM ON CIRCUITS AND SYSTEMS, VOL I, CONFERENCE PROCEEDINGS, 2002, : 25 - 28
  • [43] Micro-electromechanical Systems for Nano-science
    U. Staufer
    C. Beuret
    S. Gautsch
    W. Noell
    G. Schüurmann
    C. Stebler
    N.F. de Rooij
    Journal of Nanoparticle Research, 2000, 2 : 413 - 418
  • [44] The squeeze film effect on micro-electromechanical resonators
    Sun, Shih-Chieh
    Chung, Chi-Wei
    Hsu, Chao-Ming
    Kuang, Jao-Hwa
    JOURNAL OF VIBROENGINEERING, 2012, 14 (04) : 1486 - 1493
  • [45] Micro-electromechanical systems: Motion control of micro-actuators
    Lyshevski, SE
    PROCEEDINGS OF THE 37TH IEEE CONFERENCE ON DECISION AND CONTROL, VOLS 1-4, 1998, : 4334 - 4335
  • [46] An Analytical Approach For Strongly Nonlinear Oscillator Arising In The Micro-Electromechanical System (MEMS)
    Chen Sheng-Min
    Ren Dong-Xu
    2012 INTERNATIONAL CONFERENCE ON INDUSTRIAL CONTROL AND ELECTRONICS ENGINEERING (ICICEE), 2012, : 1632 - 1634
  • [47] Resonance frequency tracking and measuring system for micro-electromechanical cantilever array sensors
    Ju Liao
    Jingjing Wang
    Nannan Li
    Yinfang Zhu
    Jinying Zhang
    Jinling Yang
    Fuhua Yang
    Microsystem Technologies, 2017, 23 : 2013 - 2021
  • [48] Noise behaviors of a closed-loop micro-electromechanical system capacitive accelerometer
    马铭骏
    金仲和
    刘义冬
    马铁英
    Journal of Central South University, 2015, 22 (12) : 4634 - 4644
  • [49] Micro-electromechanical system (MEMS) component research and development for Army missile applications
    Hudson, TD
    McMillen, DK
    Ashley, PR
    Ruffin, PB
    Baeder, J
    ACQUISITION, TRACKING, AND POINTING XIII, 1999, 3692 : 112 - 122
  • [50] Noise behaviors of a closed-loop micro-electromechanical system capacitive accelerometer
    Ming-jun Ma
    Zhong-he Jin
    Yi-dong Liu
    Tie-ying Ma
    Journal of Central South University, 2015, 22 : 4634 - 4644
12345