A fractal micro-electromechanical system and its pull-in stability

被引：87

作者：

Tian, Dan ^{[1
]}

He, Chun-Hui ^{[2
]}

机构：

[1] Xian Univ Architecture & Technol, Sch Sci, Xian, Peoples R China

[2] Xian Univ Architecture & Technol, Sch Civil Engn, Xian, Peoples R China

来源：

JOURNAL OF LOW FREQUENCY NOISE VIBRATION AND ACTIVE CONTROL | 2021年 / 40卷 / 03期

关键词：

Micro-electromechanical systems; pull-in; fractal space; porous medium; fractal derivative; CALCULUS; MODEL;

D O I：

10.1177/1461348420984041

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

Pull-in instability occurs in a micro-electromechanical system, and it greatly hinders its normal operation. A fractal modification is suggested to make the system stable in all operation period. A fractal model is established using a fractal derivative, and the results show that by suitable fabrication of the micro-electromechanical system device, the pull-in instability can be converted into a novel state of pull-in stability.

引用

页码：1380 / 1386

页数：7

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