Resonance frequency tracking and measuring system for micro-electromechanical cantilever array sensors

被引：0
|
作者：
Ju Liao
Jingjing Wang
Nannan Li
Yinfang Zhu
Jinying Zhang
Jinling Yang
Fuhua Yang
机构：
[1] Chinese Academy of Sciences,Institute of Semiconductors
[2] State Key Laboratory of Transducer Technology,undefined
来源：
Microsystem Technologies | 2017年 / 23卷
关键词：
Phase Lock Loop; Voltage Control Oscillator; Pulse Number; Wheatstone Bridge; Instrumentation Amplifier;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
This paper presents a resonance frequency tracking and measuring system for MEMS cantilever array sensors. A cell constitutes five micro-cantilevers driven by a piezoactuator, and the resonance signal of each micro-cantilever is read out by a Wheatstone bridge. An analog resonance circuit is developed to track all resonance frequencies. Meanwhile, a digital circuit base on Microcontroller Unit is utilized to measure the resonance frequency and processes the data. The developed system has a frequency capture range from 190 to 310 kHz. The measurement accuracy of the frequency measuring circuit is 0.3 Hz. Moreover, the frequency stability of micro-cantilever in this system can achieve 4 Hz. This system provides a promising approach to apply micro-cantilever array sensors in a portable instrument.
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页码：2013 / 2021
页数：8
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