Comment on "Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas" [Phys. Plasmas 22, 013501 (2015)]

被引:1
|
作者
Bogdanov, E. A. [1 ]
Eliseev, S. I. [1 ,2 ]
Kudryavtsev, A. A. [1 ,2 ]
机构
[1] St Petersburg State Univ, St Petersburg 199034, Russia
[2] ITMO Univ, St Petersburg 197101, Russia
关键词
D O I
10.1063/1.4916650
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
引用
收藏
页数:1
相关论文
共 50 条
  • [1] Response to "Comment on 'Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas'" [Phys. Plasmas 22, 044701 (2015)]
    Kim, June Young
    Kim, Young-Cheol
    Kim, Yu-Sin
    Chung, Chin-Wook
    [J]. PHYSICS OF PLASMAS, 2015, 22 (04)
  • [2] Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas
    Kim, June Young
    Kim, Young-Cheol
    Kim, Yu-Sin
    Chung, Chin-Wook
    [J]. PHYSICS OF PLASMAS, 2015, 22 (01)
  • [3] Effect of low frequency power on the electron energy distribution function in argon inductively coupled plasmas
    Kim, Ju-Ho
    Kwon, Deuk-Chul
    Chung, Chin-Wook
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2020, 38 (02):
  • [4] Modeling argon inductively coupled plasmas: The electron energy distribution function and metastable kinetics
    Kiehlbauch, MW
    Graves, DB
    [J]. JOURNAL OF APPLIED PHYSICS, 2002, 91 (06) : 3539 - 3546
  • [5] Optical diagnostics for characterization of electron energy distributions: argon inductively coupled plasmas
    Boffard, John B.
    Jung, R. O.
    Lin, Chun C.
    Aneskavich, L. E.
    Wendt, A. E.
    [J]. PLASMA SOURCES SCIENCE & TECHNOLOGY, 2011, 20 (05):
  • [6] Comment on "The universal instability in general geometry" [Phys. Plasmas 22, 090706 (2015)]
    Smolyakov, A. I.
    Yagi, M.
    Kishimoto, Y.
    [J]. PHYSICS OF PLASMAS, 2016, 23 (11)
  • [7] Lorentz force effects on the electron energy distribution in inductively coupled plasmas
    Godyak, VA
    Alexandrovich, BM
    Kolobov, VI
    [J]. PHYSICAL REVIEW E, 2001, 64 (02): : 10 - 264061
  • [8] Effect of electron energy distributions on the electron density in nitrogen inductively coupled plasmas
    Kim, Kwan-Yong
    Kim, Jung Hyung
    Chung, Chin-Wook
    Lee, Hyo-Chang
    [J]. PLASMA SOURCES SCIENCE & TECHNOLOGY, 2022, 31 (10):
  • [9] Comment on "Large-scale Alfven vortices" [Phys. Plasmas 22, 122901 (2015)]
    Kaladze, T. D.
    [J]. PHYSICS OF PLASMAS, 2016, 23 (03)
  • [10] Comment on "A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma" [Phys. Plasmas 22, 123504 (2015)]
    Ding, Z. F.
    [J]. PHYSICS OF PLASMAS, 2021, 28 (06)