共 50 条
- [43] Electron energy distribution function measurements and plasma parameters in inductively coupled argon plasma [J]. PLASMA SOURCES SCIENCE & TECHNOLOGY, 2002, 11 (04): : 525 - 543
- [45] Effect of driving frequency on the electron energy probability function of capacitively coupled argon plasmas comparison between simulation and experiment [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2004, 43 (6A): : 3590 - 3591