Comment on "Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas" [Phys. Plasmas 22, 013501 (2015)]

被引:1
|
作者
Bogdanov, E. A. [1 ]
Eliseev, S. I. [1 ,2 ]
Kudryavtsev, A. A. [1 ,2 ]
机构
[1] St Petersburg State Univ, St Petersburg 199034, Russia
[2] ITMO Univ, St Petersburg 197101, Russia
关键词
D O I
10.1063/1.4916650
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
引用
收藏
页数:1
相关论文
共 50 条
  • [21] Characterization of Ion Energy Distribution in Inductively Coupled Argon Plasmas Sustained with Multiple Internal-Antenna Units
    Takenaka, Kosuke
    Setsuhara, Yuichi
    Nishisakai, Kazuaki
    Ebe, Akinori
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2008, 47 (08) : 6900 - 6902
  • [22] Characterization of ion energy distribution in inductively coupled argon plasmas sustained with multiple internal-antenna units
    Takenaka, Kosuke
    Setsuhara, Yuichi
    Nishisaka, Kazuaki
    Ebe, Akinori
    [J]. Japanese Journal of Applied Physics, 2008, 47 (8 PART 3): : 6900 - 6902
  • [23] Response to "Comment on 'Effects of damping solitary wave in a viscosity bounded plasma'" [Phys. Plasmas 22, 074701 (2015)]
    Li, Gun
    Yang, Xue
    Duan, Wen-shan
    [J]. PHYSICS OF PLASMAS, 2015, 22 (07)
  • [24] Electron energy distribution modification by RF bias in Ar/SF6 inductively coupled plasmas
    Lee, Hyo-Chang
    Chung, Chin-Wook
    Kim, J. H.
    Seong, D. J.
    [J]. APPLIED PHYSICS LETTERS, 2019, 115 (06)
  • [25] Comment on "Existence domains of slow and fast ion-acoustic solitons in two-ion space plasmas" [Phys. Plasmas 22, 032313 (2015)]
    Olivier, C. P.
    Maharaj, S. K.
    Bharuthram, R.
    [J]. PHYSICS OF PLASMAS, 2016, 23 (06)
  • [26] Comment on "Surface waves on quantum plasma half-space with electron exchange-correlation effects" [Phys. Plasmas 22, 122112 (2015)]
    Akbari-Moghanjoughi, M.
    [J]. PHYSICS OF PLASMAS, 2016, 23 (03)
  • [27] Observation of collisionless heating of low energy electrons in low pressure inductively coupled argon plasmas
    Lee, Min-Hyong
    Lee, Hyo-Chang
    Chung, Chin-Wook
    [J]. APPLIED PHYSICS LETTERS, 2008, 93 (23)
  • [28] Comment on 'The ion kinetic D'Angelo mode' [Phys. Plasmas 18, 102105 (2011)] (vol 22, 044703, 2015)
    Aman-ur-Rehman
    Shan, Shaukat Ali
    Saleem, Hamid
    [J]. PHYSICS OF PLASMAS, 2015, 22 (10)
  • [29] Characterization of electron kinetics regime with electron energy probability functions in inductively coupled hydrogen plasmas
    Kim, June Young
    Cho, Won-Hwi
    Dang, Jeong-Jeung
    Chung, Kyoung-Jae
    Hwang, Y. S.
    [J]. PHYSICS OF PLASMAS, 2016, 23 (02)
  • [30] Comment on "Temperature dependence of pump coupling in two-plasmon decay instability of an electromagnetic wave in homogeneous fluid plasmas" [Phys. Plasmas 22, 084503 (2015)]
    Tikhonchuk, V. T.
    [J]. PHYSICS OF PLASMAS, 2015, 22 (10)