Response to "Comment on 'Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas'" [Phys. Plasmas 22, 044701 (2015)]

被引：1
|
作者：
Kim, June Young [1 ]
Kim, Young-Cheol [1 ]
Kim, Yu-Sin [2 ]
Chung, Chin-Wook [2 ]
机构：
[1] Hanyang Univ, Dept Nanoscale Semicond Engn, Seoul 133791, South Korea
[2] Hanyang Univ, Dept Elect Engn, Seoul 133791, South Korea
来源：
PHYSICS OF PLASMAS | 2015年 / 22卷 / 04期
关键词：
D O I：
10.1063/1.4916651
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
引用
收藏
页数：1
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