Novel high Q-factor resonant microsensor platform for chemical and biological applications

被引：0
|
作者：
Seo, JH [1 ]
Brand, O [1 ]
机构：
[1] Georgia Inst Technol, Sch Elect & Comp Engn, Atlanta, GA 30332 USA
来源：
TRANSDUCERS '05, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2005年
关键词：
resonant sensor; quality factor; chemical sensor; mass-sensitive sensor;
D O I：
暂无
中图分类号：
R318 [生物医学工程];
学科分类号：
0831 ;
摘要：
A novel resonant microsensor platform for chemical and biological sensing applications in gaseous and liquid environment is reported. To achieve a high quality factor, the disk-shape microstructure is operated in a rotational in-plane mode with typical resonance frequencies between 300 and 700 kHz. The resonators feature electrothermal excitation elements and a piezoresistive Wheatstone bridge for detection, sensitive only to the inplane rotational vibration mode. Resonant microsensors with different dimensions have been fabricated and extensively characterized, achieving quality factors up to 5800 in air. Preliminary tests performed in water after parylene coating show a Q-factor of approx. 100.
引用
收藏
页码：593 / 596
页数：4
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