Laser-Assisted Formation of High-Quality Polycrystalline Diamond Membranes

被引：10

作者：

Sedov, V. S. ^{[1
]}

Voronin, A. A. ^{[2
]}

Komlenok, M. S. ^{[1
]}

Savin, S. S. ^{[3
]}

Martyanov, A. K. ^{[1
]}

Popovich, A. F. ^{[1
]}

Altakhov, A. S. ^{[1
]}

Kurochka, A. S. ^{[2
]}

Markus, D., V ^{[2
]}

Ralchenko, V. G. ^{[1
]}

机构：

[1] Russian Acad Sci, Prokhorov Gen Phys Inst, Vavilova Str 38, Moscow 119991, Russia

[2] JSC RPC Istok, Fryazino 141190, Moscow Region, Russia

[3] MIREA Russian Technol Univ, Prospect Vernadskogo 78, Moscow 119454, Russia

来源：

JOURNAL OF RUSSIAN LASER RESEARCH | 2020年 / 41卷 / 03期

基金：

俄罗斯科学基金会;

关键词：

polycrystalline diamond; chemical-vapor-deposition (CVD) technique; laser ablation; membranes; etching;

D O I：

10.1007/s10946-020-09881-x

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A polycrystalline diamond film is grown on a 2 inch Si substrate using a microwave-plasma chemicalvapor-deposition technique. The high quality of the diamond films is confirmed by Raman spectra. A multiple-step procedure is used for local etching of the substrate to form the pattern of an array of 50 diamond membranes with the diameter in a range from 150 to 300 mu m. The morphology of the membranes is examined using scanning electron microscopy. The membranes obtained can be used as the base material for the fabrication of pressure sensors, X-ray detectors and scintillators, and in quantum optics as optical resonators for single-color centers in diamond.

引用

页码：321 / 326

页数：6

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