Laser-Assisted Formation of High-Quality Polycrystalline Diamond Membranes

被引：10

作者：

Sedov, V. S. ^{[1
]}

Voronin, A. A. ^{[2
]}

Komlenok, M. S. ^{[1
]}

Savin, S. S. ^{[3
]}

Martyanov, A. K. ^{[1
]}

Popovich, A. F. ^{[1
]}

Altakhov, A. S. ^{[1
]}

Kurochka, A. S. ^{[2
]}

Markus, D., V ^{[2
]}

Ralchenko, V. G. ^{[1
]}

机构：

[1] Russian Acad Sci, Prokhorov Gen Phys Inst, Vavilova Str 38, Moscow 119991, Russia

[2] JSC RPC Istok, Fryazino 141190, Moscow Region, Russia

[3] MIREA Russian Technol Univ, Prospect Vernadskogo 78, Moscow 119454, Russia

来源：

JOURNAL OF RUSSIAN LASER RESEARCH | 2020年 / 41卷 / 03期

基金：

俄罗斯科学基金会;

关键词：

polycrystalline diamond; chemical-vapor-deposition (CVD) technique; laser ablation; membranes; etching;

D O I：

10.1007/s10946-020-09881-x

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A polycrystalline diamond film is grown on a 2 inch Si substrate using a microwave-plasma chemicalvapor-deposition technique. The high quality of the diamond films is confirmed by Raman spectra. A multiple-step procedure is used for local etching of the substrate to form the pattern of an array of 50 diamond membranes with the diameter in a range from 150 to 300 mu m. The morphology of the membranes is examined using scanning electron microscopy. The membranes obtained can be used as the base material for the fabrication of pressure sensors, X-ray detectors and scintillators, and in quantum optics as optical resonators for single-color centers in diamond.

引用

页码：321 / 326

页数：6

共 50 条

[31] Approaches to synthesis of high-quality diamond
Xie, G.-Z.
Wang, S.-B.
Tang, Z.-J.
Du, X.-D.
Dai, L.-F.
Chen, Z.-X.
Kuangye Gongcheng/Mining and Metallurgical Engineering, 2001, 21 (02): : 64 - 66
[32] LASER-ASSISTED HIGH DEFINITION LIPOSCULPTURE
Millard, John
LASERS IN SURGERY AND MEDICINE, 2010, : 64 - 64
[33] Nanoparticle formation by laser-assisted photolysis of ferrocene
Ångström Laboratory, Box 538, Uppsala University, 751 21 Uppsala, Sweden
不详
Nanostruct Mater, 1 (79-82):
[34] Laser-assisted formation of metallic oxide microtubes
Nanai, L
George, TF
JOURNAL OF MATERIALS RESEARCH, 1997, 12 (01) : 283 - 284
[35] Formation of SiC nanoparticles by laser-assisted CVD
Kamlag, Y
Goossens, A
Colbeck, I
Schoonman, J
CHEMICAL VAPOR DEPOSITION, 2003, 9 (03) : 125 - 129
[36] Dipolar focusing in laser-assisted positronium formation
Ambalampitiya, H. B.
Matfunjwa, M. K.
Fabrikant, I. I.
JOURNAL OF PHYSICS B-ATOMIC MOLECULAR AND OPTICAL PHYSICS, 2024, 57 (10)
[37] Laser-assisted formation of micropipettes for biomedicine.
Markovkina, N
Zung, ZC
Yakovlev, EB
Veiko, VP
LASER-ASSISTED MICRO- AND NANOTECHNOLOGIES 2003, 2004, 5399 : 245 - 252
[38] Laser-assisted Truing for Metal-bonded Diamond Wheel
Yamada, Keiji
Togo, Shiro
Tomita, Yukio
Yamane, Yasuo
Sekiya, Katsuhiko
PROGRESS OF MACHINING TECHNOLOGY, 2009, 407-408 : 122 - +
[39] Surface generation of tungsten carbide in laser-assisted diamond turning
You, Kaiyuan
Fang, Fengzhou
Yan, Guangpeng
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, 2021, 168
[40] Ultraprecision laser-assisted diamond machining of single crystal Ge
Shahinian, Hossein
Di, Kang
Navare, Jayesh
Bodlapati, Charan
Zaytsev, Dmytro
Ravindra, Deepak
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2020, 65 (65): : 149 - 155

← 1 2 3 4 5 →