CANTILEVER-BASED RESONANT MICROSENSORS WITH INTEGRATED TEMPERATURE MODULATION FOR TRANSIENT CHEMICAL ANALYSIS

被引：0
|
作者：
Carron, C. [1 ]
Getz, P. [1 ]
Heinrich, S. M. [2 ]
Josse, F. [2 ]
Brand, O. [1 ]
机构：
[1] Georgia Inst Technol, Atlanta, GA 30332 USA
[2] Marquette Univ, Milwaukee, WI 53233 USA
来源：
2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2015年
基金：
美国国家科学基金会;
关键词：
MEMS; chemical sensing; VOC; resonant cantilevers; SINGLE-CHIP;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This work introduces a resonant cantilever platform with integrated temperature modulation for real-time chemical sensing. Embedded heaters allow for rapid thermal cycling of individual sensors, thereby enabling real-time transient signal analysis without the need for a microfluidic setup to switch between analyte and reference gases. Compared to traditional mass-sensitive microsensors operating in steady state, the on-chip generation of signal transients provides additional information for analyte discrimination.
引用
收藏
页码：1511 / 1514
页数：4
相关论文
共 50 条
  • [1] Cantilever-Based Resonant Chemical Microsensors
    Brand, O.
    Getz, P.
    Carron, C.
    MICROFABRICATED AND NANOFABRICATED SYSTEMS FOR MEMS/NEMS 12, 2016, 75 (17): : 27 - 34
  • [2] CMOS chemical microsensors based on resonant cantilever beams
    Lange, D
    Koll, A
    Brand, O
    Baltes, H
    SMART STRUCTURES AND MATERIALS 1998: SMART ELECTRONICS AND MEMS, 1998, 3328 : 233 - 243
  • [3] Cantilever-Based Resonant Gas Sensors with Integrated Recesses for Localized Sensing Layer Deposition
    Carron, C.
    Getz, P.
    Su, J. -J.
    Gottfried, D. S.
    Brand, O.
    Josse, F.
    Heinrich, S. M.
    2013 IEEE SENSORS, 2013, : 826 - 829
  • [4] Polymeric cantilever-based biosensors with integrated readout
    Johansson, Alicia
    Blagoi, Gabriela
    Boisen, Anja
    APPLIED PHYSICS LETTERS, 2006, 89 (17)
  • [5] Cantilever-based bio-chemical sensor integrated in a microliquid handling system
    Thaysen, J
    Marie, R
    Boisen, A
    14TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2001, : 401 - 404
  • [6] Temperature compensation method for resonant microsensors based on a controlled stiffness modulation
    Seo, Jae Hyeong
    Demirci, Kemal Safak
    Byun, Albert
    Truax, Stuart
    Brand, Oliver
    JOURNAL OF APPLIED PHYSICS, 2008, 104 (01)
  • [7] Temperature compensation method for resonant microsensors based on a controlled stiffness modulation
    Seo, Jae Hyeong
    Demirci, Kemal Safak
    Byun, Albert
    Truax, Stuart
    Brand, Oliver
    Journal of Applied Physics, 2008, 104 (01):
  • [8] Integrated optical readout for miniaturization of cantilever-based sensor system
    Nordstrom, Maria
    Zauner, Dan A.
    Calleja, Montserrat
    Hubner, Jorg
    Boisen, Anja
    APPLIED PHYSICS LETTERS, 2007, 91 (10)
  • [9] ON-DEMAND PREPARATION OF GAS-SENSING MATERIALS GUIDED BY RESONANT CANTILEVER-BASED THERMOGRAVIMETRIC ANALYSIS
    Zhou, Yufan
    Li, Ming
    Chen, Ying
    Li, Xinyu
    Xu, Pengcheng
    Li, Xinxin
    2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS, 2023, : 255 - 258
  • [10] Frequency Analysis of Electrostatic Cantilever-based MEMS Sensor
    Shoaib, Muhammad
    Hisham, Nor
    Basheer, Noohul
    Tariq, Mohammad
    2015 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP), 2015,
12345