ON-DEMAND PREPARATION OF GAS-SENSING MATERIALS GUIDED BY RESONANT CANTILEVER-BASED THERMOGRAVIMETRIC ANALYSIS

被引:0
|
作者
Zhou, Yufan [1 ,2 ]
Li, Ming [1 ,2 ]
Chen, Ying [1 ,2 ]
Li, Xinyu [1 ,2 ]
Xu, Pengcheng [1 ,2 ]
Li, Xinxin [1 ,2 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China
[2] Univ Chinese Acad Sci, Sch Microelect, Beijing 100049, Peoples R China
来源
2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS | 2023年
基金
中国国家自然科学基金; 国家重点研发计划;
关键词
Resonant microcantilever; thermogravimetric analysis; calcination; nanomaterial; SENSORS;
D O I
10.1109/MEMS49605.2023.10052606
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work, the preparation conditions of Mn3O4 nanowires for formaldehyde (HCHO) sensing are optimized with a resonant cantilever-based thermogravimetric analysis (referred to as cantilever-TGA) technology. The cantilever-TGA technology only consumes about 20 ng of samples for one measurement, which is six orders of magnitude lower than the mainstream commercial-available TGA instruments, making it ideal for exploring optimal sample preparation conditions. Herein the cantilever-TGA technology has been successfully used to investigate the preparation conditions of Mn3O4 sensing material from the precursor of b-MnO2 nanowires. With the guidance of cantilever-TGA, pure-phase and morphology well-maintained Mn3O4 gas-sensing materials can be obtained under H-2 atmosphere at 330 degrees C, which is 230 degrees C lower than N-2 atmosphere. Due to the well-maintained nanowire-like structure and high mobility, the response of the Mn3O4@H-2 material to HCHO is one-fold higher than that of the Mn3O4@N-2 material.
引用
收藏
页码:255 / 258
页数:4
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