CANTILEVER-BASED RESONANT MICROSENSORS WITH INTEGRATED TEMPERATURE MODULATION FOR TRANSIENT CHEMICAL ANALYSIS

被引：0

作者：

Carron, C. ^{[1
]}

Getz, P. ^{[1
]}

Heinrich, S. M. ^{[2
]}

Josse, F. ^{[2
]}

Brand, O. ^{[1
]}

机构：

[1] Georgia Inst Technol, Atlanta, GA 30332 USA

[2] Marquette Univ, Milwaukee, WI 53233 USA

来源：

2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2015年

基金：

美国国家科学基金会;

关键词：

MEMS; chemical sensing; VOC; resonant cantilevers; SINGLE-CHIP;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This work introduces a resonant cantilever platform with integrated temperature modulation for real-time chemical sensing. Embedded heaters allow for rapid thermal cycling of individual sensors, thereby enabling real-time transient signal analysis without the need for a microfluidic setup to switch between analyte and reference gases. Compared to traditional mass-sensitive microsensors operating in steady state, the on-chip generation of signal transients provides additional information for analyte discrimination.

引用

页码：1511 / 1514

页数：4

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