CANTILEVER-BASED RESONANT MICROSENSORS WITH INTEGRATED TEMPERATURE MODULATION FOR TRANSIENT CHEMICAL ANALYSIS

被引：0
|
作者：
Carron, C. [1 ]
Getz, P. [1 ]
Heinrich, S. M. [2 ]
Josse, F. [2 ]
Brand, O. [1 ]
机构：
[1] Georgia Inst Technol, Atlanta, GA 30332 USA
[2] Marquette Univ, Milwaukee, WI 53233 USA
来源：
2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2015年
基金：
美国国家科学基金会;
关键词：
MEMS; chemical sensing; VOC; resonant cantilevers; SINGLE-CHIP;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This work introduces a resonant cantilever platform with integrated temperature modulation for real-time chemical sensing. Embedded heaters allow for rapid thermal cycling of individual sensors, thereby enabling real-time transient signal analysis without the need for a microfluidic setup to switch between analyte and reference gases. Compared to traditional mass-sensitive microsensors operating in steady state, the on-chip generation of signal transients provides additional information for analyte discrimination.
引用
收藏
页码：1511 / 1514
页数：4
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