Design of temperature controlled micro-hotplate for CMOS CO sensor

被引：0
|
作者：
Peng, Benxian [1 ]
Yu, Ting [1 ]
Yu, Fengqi [1 ]
机构：
[1] Chinese Acad Sci, Shenzhen Inst Adv Technol, Dept Integrated Elect, Shenzhen 518067, Peoples R China
来源：
2008 3RD IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3 | 2008年
关键词：
finite difference algorithm; subthreshold region; micro-hotplate; CO sensor;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A novel design for the temperature control of a micro-hotplate gas sensor is presented. Finite difference algorithm is developed to solve the sensor temperature stability problem under ambient air interference. A simple circuit is proposed to accurately adjust the micro-hotplate temperature with a resolution of 0.04 degrees C. The proposed sensor has ultra low power consumption (about 13.9 mu W) and is a good candidate for wireless sensor network applications.
引用
收藏
页码：895 / 898
页数：4
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