Design of temperature controlled micro-hotplate for CMOS CO sensor

被引：0
|
作者：
Peng, Benxian [1 ]
Yu, Ting [1 ]
Yu, Fengqi [1 ]
机构：
[1] Chinese Acad Sci, Shenzhen Inst Adv Technol, Dept Integrated Elect, Shenzhen 518067, Peoples R China
来源：
2008 3RD IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3 | 2008年
关键词：
finite difference algorithm; subthreshold region; micro-hotplate; CO sensor;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A novel design for the temperature control of a micro-hotplate gas sensor is presented. Finite difference algorithm is developed to solve the sensor temperature stability problem under ambient air interference. A simple circuit is proposed to accurately adjust the micro-hotplate temperature with a resolution of 0.04 degrees C. The proposed sensor has ultra low power consumption (about 13.9 mu W) and is a good candidate for wireless sensor network applications.
引用
收藏
页码：895 / 898
页数：4
相关论文
共 50 条
  • [21] A digital CMOS micro-hotplate array for analysis of environmentally relevant gases
    Frey, U
    Graf, M
    Taschini, S
    Kirstein, KU
    Hagleitner, C
    Hierlemann, A
    Baltes, H
    ESSCIRC 2004: PROCEEDINGS OF THE 30TH EUROPEAN SOLID-STATE CIRCUITS CONFERENCE, 2004, : 299 - 302
  • [22] Design and Simulation of a High Temperature MEMS Micro-hotplate for Application in Trace Gas Detection
    Ahmed, Abdelaziz Yousif
    Dennis, John Ojur
    Saad, Mohamad Naufal Mohamad
    Talah, Waddah Abdelbagi
    ICSE: 2008 IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS, PROCEEDINGS, 2008, : 153 - 157
  • [23] Research on Thermal Field Coupling Simulation of Silicon-based Micro-hotplate CO Sensor
    Ma, Tianjun
    Li, Na
    Liu, Yinghao
    Yue, Wenjing
    Sun, Jianhai
    2024 IEEE INTERNATIONAL SYMPOSIUM ON OLFACTION AND ELECTRONIC NOSE, ISOEN, 2024,
  • [24] Design and optimisation of a high-temperature silicon micro-hotplate for nanoporous palladium pellistors
    Lee, SM
    Dyer, DC
    Gardner, JW
    MICROELECTRONICS JOURNAL, 2003, 34 (02) : 115 - 126
  • [25] Micro-Hotplate Devices for Micro-SOFC
    Beckel, D.
    Briand, D.
    Courbat, J.
    Bieberle-Huetter, A.
    de Rooij, N. F.
    Gauckler, L. J.
    SOLID OXIDE FUEL CELLS 10 (SOFC-X), PTS 1 AND 2, 2007, 7 (01): : 421 - +
  • [26] Research Progress on Coating of Sensitive Materials for Micro-Hotplate Gas Sensor
    Yuan, Zhenyu
    Yang, Fan
    Meng, Fanli
    MICROMACHINES, 2022, 13 (03)
  • [27] MEMS-based formaldehyde gas sensor integrated with a micro-hotplate
    Chia-Yen Lee
    Ping-Ru Hsieh
    Che-Hsin Lin
    Po-Cheng Chou
    Lung-Ming Fu
    Che-Ming Chiang
    Microsystem Technologies, 2006, 12 : 893 - 898
  • [28] Micro-hotplate temperature measurement system based on radiation power
    State Key Laboratory on Integrated Optoelectronics, Jilin University, Changchun 130012, China
    不详
    不详
    Jilin Daxue Xuebao (Gongxueban), 2008, 4 (936-939):
  • [29] Design and fabrication of planar-type micro-hotplate with Si-island gas sensor
    Zhu Bin
    Yin Chen-bo
    Zhang Zi-li
    Tao Chun-min
    Dong Ning-ning
    SMART MATERIALS AND NANOTECHNOLOGY IN ENGINEERING, 2012, 345 : 23 - 28
  • [30] Thermal analysis and measurement of micro-hotplate
    Kung Cheng Je Wu Li Hsueh Pao/Journal of Engineering Thermophysics, 2001, 22 (02):
12345