Performance Analysis of Microsystems in the Presence of Pull-In Instability

被引：0
|
作者：
Ghiasi, Emran Khoshrouye [1 ]
机构：
[1] Ferdowsi Univ Mashhad, Dept Mech Engn, Mashhad, Iran
来源：
2015 2ND INTERNATIONAL CONFERENCE ON KNOWLEDGE-BASED ENGINEERING AND INNOVATION (KBEI) | 2015年
关键词：
Micro-beam; Pull-in instability; Reynolds equation; Dimensionless variables; ELECTRICALLY ACTUATED MICROBEAM; MICROELECTROMECHANICAL SYSTEMS; SQUEEZE-FILM; MEMS;
D O I：
暂无
中图分类号：
TP39 [计算机的应用];
学科分类号：
081203 ; 0835 ;
摘要：
Objective of the current work is to represent performance analysis of microsystems in the presence of pull-in instability phenomenon. To this end, the Euler-Bernoulli beam theory, and non-linear Reynolds equation are considered, and the generalized differential quadrature method (GDQM) is employed to solve the nonlinear partial differential governing equations. A parametric study conducted, focusing on the combined effects of geometric non-linearity, Squeeze-film damping (SQFD), distributed load, inertial gap, and material properties. The results reveal that the pull-in instability of poly silicon micro-beam is strongly size-dependent. It is also demonstrated that neglecting pressure in Reynolds equation will cause smaller values in pull-in time.
引用
收藏
页码：95 / 100
页数：6
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