Performance Analysis of Microsystems in the Presence of Pull-In Instability

被引：0
|
作者：
Ghiasi, Emran Khoshrouye [1 ]
机构：
[1] Ferdowsi Univ Mashhad, Dept Mech Engn, Mashhad, Iran
来源：
2015 2ND INTERNATIONAL CONFERENCE ON KNOWLEDGE-BASED ENGINEERING AND INNOVATION (KBEI) | 2015年
关键词：
Micro-beam; Pull-in instability; Reynolds equation; Dimensionless variables; ELECTRICALLY ACTUATED MICROBEAM; MICROELECTROMECHANICAL SYSTEMS; SQUEEZE-FILM; MEMS;
D O I：
暂无
中图分类号：
TP39 [计算机的应用];
学科分类号：
081203 ; 0835 ;
摘要：
Objective of the current work is to represent performance analysis of microsystems in the presence of pull-in instability phenomenon. To this end, the Euler-Bernoulli beam theory, and non-linear Reynolds equation are considered, and the generalized differential quadrature method (GDQM) is employed to solve the nonlinear partial differential governing equations. A parametric study conducted, focusing on the combined effects of geometric non-linearity, Squeeze-film damping (SQFD), distributed load, inertial gap, and material properties. The results reveal that the pull-in instability of poly silicon micro-beam is strongly size-dependent. It is also demonstrated that neglecting pressure in Reynolds equation will cause smaller values in pull-in time.
引用
收藏
页码：95 / 100
页数：6
相关论文
共 50 条
  • [31] Investigation of dynamic pull-in instability of suspended microchannel resonators using homotopy analysis method
    Mohsen Vakilzadeh
    Ramin Vatankhah
    Mohammad Eghtesad
    Journal of the Brazilian Society of Mechanical Sciences and Engineering, 2021, 43
  • [32] Pull-in instability and nonlinear vibration analysis of electrostatically piezoelectric nanoresonator with surface/interface effects
    Kachapi, Sayyid H. Hashemi
    Dardel, Morteza
    Daniali, Hamidreza Mohamadi
    Fathi, Alireza
    THIN-WALLED STRUCTURES, 2019, 143
  • [33] Investigation of dynamic pull-in instability of suspended microchannel resonators using homotopy analysis method
    Vakilzadeh, Mohsen
    Vatankhah, Ramin
    Eghtesad, Mohammad
    JOURNAL OF THE BRAZILIAN SOCIETY OF MECHANICAL SCIENCES AND ENGINEERING, 2021, 43 (06)
  • [34] Nonlinear pull-in instability of suspended graphene-based sensors
    Hu, Kai-Ming
    Zhang, Wen-Ming
    Yan, Han
    Peng, Zhi-Ke
    Meng, Guang
    EPL, 2019, 125 (02)
  • [35] Small scale effect on the pull-in instability and vibration of graphene sheets
    Wang, K. F.
    Wang, B. L.
    Zeng, S.
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2017, 23 (06): : 2033 - 2041
  • [36] Readout of MEMS capacitive sensors beyond the condition of pull-in instability
    Langfelder, G.
    Frizzi, T.
    Longoni, A.
    Tocchio, A.
    Manelli, D.
    Lasalandra, E.
    SENSORS AND ACTUATORS A-PHYSICAL, 2011, 167 (02) : 374 - 384
  • [37] INTERNAL RESONANCES AND BIFURCATIONS OF AN ARRAY BELOW THE FIRST PULL-IN INSTABILITY
    Gutschmidt, Stefanie
    Gottlieb, Oded
    INTERNATIONAL JOURNAL OF BIFURCATION AND CHAOS, 2010, 20 (03): : 605 - 618
  • [38] Pull-in instability analyses for NEMS actuators with quartic shape approximation
    Junsheng Duan
    Zongxue Li
    Jinyuan Liu
    Applied Mathematics and Mechanics, 2016, 37 : 303 - 314
  • [39] Observation of Pull-In Instability in Graphene Membranes under Interfacial Forces
    Liu, Xinghui
    Boddeti, Narasimha G.
    Szpunar, Mariah R.
    Wang, Luda
    Rodriguez, Miguel A.
    Long, Rong
    Xiao, Jianliang
    Dunn, Martin L.
    Bunch, J. Scott
    NANO LETTERS, 2013, 13 (05) : 2309 - 2313
  • [40] Temperature sensitivity of silicon cantilevers' elasticity with the electrostatic pull-in instability
    Sadeghian, Hamed
    Yang, Chung-Kai
    Goosen, Hans
    Bossche, Andre
    French, Paddy
    van Keulen, Fred
    SENSORS AND ACTUATORS A-PHYSICAL, 2010, 162 (02) : 220 - 224
12345