AlGaN/GaN Open-Gate High Electron Mobility Transistors for Glucose Detection

被引:1
|
作者
Liu, Jun [1 ]
Liang, Hongwei [1 ]
Xue, Dongyang [1 ]
Zhang, Heqiu [1 ]
Huang, Huishi [2 ]
Guo, Wenping [3 ]
机构
[1] Dalian Univ Technol, Sch Microelect, Dalian 116024, Peoples R China
[2] Jiangsu Xinguanglian Technol Co Ltd, Wuxi 214192, Jiangsu, Peoples R China
[3] Shandong Novoshine Co Ltd, Weifang 261000, Peoples R China
基金
美国国家科学基金会;
关键词
AlGaN/GaN; HEMT; Photo-electrochemical treatment; Glucose oxidase; APTES; Glucose; FIELD-EFFECT TRANSISTORS;
D O I
10.1117/12.2559688
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
AlGaN/GaN high electron mobility transistors (HEMTs) have more remarkable properties in application of microwave transistors for high power and high frequency. A less widely studied application is high sensitivity to detect a wide range concentration of glucose. In this work, a photo-electrochemically treated open-gate AlGaN/GaN HEMT biosensor for glucose detection was developed. Through photo-electrochemical treatment, a smooth and thin gallium oxide can be formed on the sensing region. The threshold voltage was changed from -3.3 V to -1.3 V at a swept gain voltage. And a maximum value of transconductance was obtained at the gate voltage of 0 V. Effective functionalization of 3-aminopropyltriethoxysilane (APTES) and immobilization of glucose oxidase (GOx) can be realized on the oxidized sensing region. The proposed sensor exhibited good current response to glucose concentration over a wide linear range with high sensitivity above 8.61 x 10(5) mu A/mM.cm(2). The performance of the fabricated biosensor demonstrates the possibility of using AlGaN/GaN HEMTs for high sensitivity glucose detection in biochemical application.
引用
收藏
页数:4
相关论文
共 50 条
  • [41] Oxygen Plasma Treated Aluminum as a Gate Dielectric for AlGaN/GaN High Electron Mobility Transistors
    Selvaraj, S. Lawrence
    Egawa, Takashi
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2009, 156 (09) : H690 - H693
  • [42] The impact of dislocations on AlGaN/GaN Schottky diodes and on gate failure of high electron mobility transistors
    Sven Besendörfer
    Elke Meissner
    Farid Medjdoub
    Joff Derluyn
    Jochen Friedrich
    Tobias Erlbacher
    Scientific Reports, 10
  • [43] Reverse Schottky gate current in AlGaN-GaN high-electron-mobility-transistors
    Jos, Rik
    JOURNAL OF APPLIED PHYSICS, 2012, 112 (09)
  • [44] Dual-Matal Gate AlGaN/GaN High Electron Mobility Transistors: A Theoretical Study
    Lee, Kaen Boon
    Sun, Haifeng
    Yuan, Li
    Wang, Weizhu
    Selvaraj, Susai Lawrence
    Lo, Guo-Qiong
    PROCEEDINGS OF THE 2012 IEEE INTERNATIONAL SYMPOSIUM ON RADIO-FREQUENCY INTEGRATION TECHNOLOGY (RFIT), 2012, : 186 - 188
  • [45] Space Charge Limited Gate Current Noise in AlGaN/GaN High Electron Mobility Transistors
    Xu, Weikai
    Bosman, Gijs
    2013 22ND INTERNATIONAL CONFERENCE ON NOISE AND FLUCTUATIONS (ICNF), 2013,
  • [46] Short-gate AlGaN/GaN high-electron mobility transistors with BGaN buffer
    韩铁成
    赵红东
    彭晓灿
    Chinese Physics B, 2019, 28 (04) : 330 - 335
  • [47] Electrical Characteristic of AlGaN/GaN High-Electron-Mobility Transistors With Recess Gate Structure
    Shrestha, Niraj Man
    Li, Yiming
    Suemitsu, Tetsuya
    Samukawa, Seiji
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2019, 66 (04) : 1694 - 1698
  • [48] Gate length effect on trapping properties in AlGaN/GaN high-electron-mobility transistors
    Ferrandis, Philippe
    El-Khatib, Mariam
    Jaud, Marie-Anne
    Morvan, Erwan
    Charles, Matthew
    Guillot, Gerard
    Bremond, Georges
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2019, 34 (04)
  • [49] Erosion defect formation in Ni-gate AlGaN/GaN high electron mobility transistors
    Whiting, P. G.
    Holzworth, M. R.
    Lind, A. G.
    Pearton, S. J.
    Jones, K. S.
    Liu, L.
    Kang, T. S.
    Ren, F.
    Xin, Y.
    MICROELECTRONICS RELIABILITY, 2017, 70 : 32 - 40
  • [50] Short-gate AlGaN/GaN high-electron mobility transistors with BGaN buffer
    Han, Tie-Cheng
    Zhao, Hong-Dong
    Peng, Xiao-Can
    CHINESE PHYSICS B, 2019, 28 (04)