AlGaN/GaN Open-Gate High Electron Mobility Transistors for Glucose Detection

被引:1
|
作者
Liu, Jun [1 ]
Liang, Hongwei [1 ]
Xue, Dongyang [1 ]
Zhang, Heqiu [1 ]
Huang, Huishi [2 ]
Guo, Wenping [3 ]
机构
[1] Dalian Univ Technol, Sch Microelect, Dalian 116024, Peoples R China
[2] Jiangsu Xinguanglian Technol Co Ltd, Wuxi 214192, Jiangsu, Peoples R China
[3] Shandong Novoshine Co Ltd, Weifang 261000, Peoples R China
基金
美国国家科学基金会;
关键词
AlGaN/GaN; HEMT; Photo-electrochemical treatment; Glucose oxidase; APTES; Glucose; FIELD-EFFECT TRANSISTORS;
D O I
10.1117/12.2559688
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
AlGaN/GaN high electron mobility transistors (HEMTs) have more remarkable properties in application of microwave transistors for high power and high frequency. A less widely studied application is high sensitivity to detect a wide range concentration of glucose. In this work, a photo-electrochemically treated open-gate AlGaN/GaN HEMT biosensor for glucose detection was developed. Through photo-electrochemical treatment, a smooth and thin gallium oxide can be formed on the sensing region. The threshold voltage was changed from -3.3 V to -1.3 V at a swept gain voltage. And a maximum value of transconductance was obtained at the gate voltage of 0 V. Effective functionalization of 3-aminopropyltriethoxysilane (APTES) and immobilization of glucose oxidase (GOx) can be realized on the oxidized sensing region. The proposed sensor exhibited good current response to glucose concentration over a wide linear range with high sensitivity above 8.61 x 10(5) mu A/mM.cm(2). The performance of the fabricated biosensor demonstrates the possibility of using AlGaN/GaN HEMTs for high sensitivity glucose detection in biochemical application.
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页数:4
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