A new quality factor control for vibratory MEMS gyroscope

In this paper, a new control scheme is presented to improve the quality factor of vibratory MEMS gyroscope (VMG). Quality factor is one of key factors in VMG, which can affect its linearity and sensitivity, but changed with environmental disturbances. Traditionally, the DC feedback method is utilized to control the quality factor of VMG. However, a phase delay is introduced in DC feedback method. We used a duty cycle adjustment method to generate a direct AC feedback signal. Compared with traditional DC feedback method, the proposed AC control scheme has no phase delay and jitters.