A Dual-Mass MEMS Vibratory Gyroscope with Adaptive Control Scheme

被引：0
|
作者：
Wang, Cunchao [1 ]
Wang, Shourong [1 ]
Yin, Yong [1 ]
机构：
[1] Southeast Univ, Res Inst Microinertial Syst & Device, Sch Instrument Sci & Engn, Nanjing, Peoples R China
来源：
2007 7TH IEEE CONFERENCE ON NANOTECHNOLOGY, VOL 1-3 | 2007年
关键词：
Adaptive control; dual-mass; gyroscope; microelectromechanical system (MEMS) gyroscope;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A micromachined vibratory gyroscope with two proof-masses to measure rotation rate is presented. The two proof-masses are driven electrostatically in opposite directions along drive axis to generate differential Coriolis force detection. In order to improve the performance of the MENIS gyroscope, an adaptive control method is developed. This scheme tunes the drive natural frequencies or gyroscope to a given frequency, regulates the amplitudes of the drive axis to a required value, achieves translational acceleration elimination, cancels out quadrature error due to stiffness coupling, and drives the sense axis vibration to zero for dynamic range and precision improvement. Simulation results verify the theoretical analysis.
引用
收藏
页码：25 / 28
页数：4
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