A systematic review of magnetron sputtering of AlN thin films for extreme condition sensing

被引：15
|
作者：
Mwema, F. M. [1 ]
Akinlabi, E. T. [1 ]
Oladijo, O. P. [1 ,2 ]
机构：
[1] Univ Johannesburg, Dept Mech Engn Sci, Auckland Pk Kingsway, South Africa
[2] Botswana Int Univ Sci & Technol, Dept Chem Met & Mat Engn, Palapye, Botswana
来源：
MATERIALS TODAY-PROCEEDINGS | 2020年 / 26卷
关键词：
ALUMINUM NITRIDE FILMS; TRIBOLOGICAL PROPERTIES; MECHANICAL-PROPERTIES; COATINGS; NDFEB; STEEL; WEAR;
D O I：
10.1016/j.matpr.2020.02.317
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：1546 / 1550
页数：5
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