Short-focus silicon parabolic lenses for hard X-rays

被引：28

作者：

Aristov, VV ^{[1
]}

Starkov, VV ^{[1
]}

Shabel'nikov, LG ^{[1
]}

Kuznetsov, SM ^{[1
]}

Ushakova, AP ^{[1
]}

Grigoriev, MV ^{[1
]}

Tseitlin, VM ^{[1
]}

机构：

[1] Russian Acad Sci, Inst Microelect Technol & High Pur Mat, Chernogolovka 142432, Moscow Dist, Russia

来源：

OPTICS COMMUNICATIONS | 1999年 / 161卷 / 4-6期

关键词：

X-ray; refraction; focusing; lens;

D O I：

10.1016/S0030-4018(99)00039-5

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Parabolic lenses have been formed by photoanodic etching of silicon in the form of profiles 22 mu m deep and 5 mu m in diameter. Observations with 17.46 keV radiation show that the focal length of the lenses is 7 cm and images with resolution of 3 mu m have been obtained. A procedure to evaluate the quality of real refracting profiles is suggested. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：203 / 208

页数：6

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