Epitaxial growth and characterization of graphene on free-standing polycrystalline 3C-SiC

被引:15
|
作者
Huang, Han [1 ]
Wong, Swee Liang [1 ]
Tin, Chin-Che [2 ]
Luo, Zhi Qiang [3 ]
Shen, Ze Xiang [3 ]
Chen, Wei [1 ,4 ]
Wee, Andrew Thye Shen [1 ]
机构
[1] Natl Univ Singapore, Dept Phys, Singapore 117542, Singapore
[2] Auburn Univ, Dept Phys, Coll Sci & Math, Auburn, AL 36849 USA
[3] Nanyang Technol Univ, Div Phys & Appl Phys, Sch Phys & Math Sci, Singapore 637371, Singapore
[4] Natl Univ Singapore, Dept Chem, Singapore 117543, Singapore
关键词
ATOMIC-STRUCTURE; GRAPHITIZATION; PERSPECTIVES; TRANSPORT; LAYERS; FILMS; GAS;
D O I
10.1063/1.3602993
中图分类号
O59 [应用物理学];
学科分类号
摘要
The epitaxial growth of graphene on inexpensive, commercially available, free-standing polycrystalline 3 C-SiC has been achieved by solid state graphitization in ultrahigh vacuum. The structural and electronic properties of such epitaxial graphene (EG) have been explored by Raman spectroscopy, scanning tunneling microscopy (STM), and scanning tunneling spectroscopy (STS). The Raman results show that the grown EG is compressively stressed. The quality of such EG is similar to that on single-crystalline hexagonal SiC substrates. The STM measurements show that the EG grown on polycrystalline SiC presents atomically smooth surfaces across large regions of the underlying SiC substrate with some nanometer-scale features, such as one-dimensional (1-D) ridges, 1-D grain boundaries, and graphene in different stacking sequences. The STS measurements reveal the electronic properties of such EG at an atomic scale. Our approach suggests a more inexpensive way to grow high quality and large scale graphene and represents a promising step toward commercialization of graphene-based electronics. (C) 2011 American Institute of Physics. [doi:10.1063/1.3602993]
引用
收藏
页数:5
相关论文
共 50 条
  • [41] Advanced approach of bulk (111) 3C-SiC epitaxial growth
    Calabretta, C.
    Scuderi, V.
    Bongiorno, C.
    Anzalone, R.
    Reitano, R.
    Cannizzaro, A.
    Mauceri, M.
    Crippa, D.
    Boninelli, S.
    La Via, F.
    MICROELECTRONIC ENGINEERING, 2024, 283
  • [42] Control of pendeo epitaxial growth of 3C-SiC on silicon substrate
    Okui, Y
    Jacob, C
    Ohshima, S
    Nishino, S
    SILICON CARBIDE AND RELATED MATERIALS - 2002, 2002, 433-4 : 209 - 212
  • [44] INFRARED REFLECTION OF POLYCRYSTALLINE 3C-SIC
    LAPTEV, AV
    IVANOVA, LM
    INORGANIC MATERIALS, 1994, 30 (08) : 960 - 962
  • [45] Fabrication of polycrystalline 3C-SiC microstructures
    Ohn, Chang-Min
    Lee, Jong-Hwa
    Chung, Gwiy-Sang
    EDM 2007: 8TH INTERNATIONAL WORKSHOP AND TUTORIALS ON ELECTRON DEVICES AND MATERIALS, 2007, : 25 - 26
  • [46] Direct growth of quasi-free-standing epitaxial graphene on nonpolar SiC surfaces
    Ostler, M.
    Deretzis, I.
    Mammadov, S.
    Giannazzo, F.
    Nicotra, G.
    Spinella, C.
    Seyller, Th.
    La Magna, A.
    PHYSICAL REVIEW B, 2013, 88 (08):
  • [47] Epitaxial graphene growth on FIB patterned 3C-SiC nanostructures on Si (111): reducing milling damage
    Amjadipour, Mojtaba
    MacLeod, Jennifer
    Lipton-Duffin, Josh
    Iacopi, Francesca
    Motta, Nunzio
    NANOTECHNOLOGY, 2017, 28 (34)
  • [48] Processing and characterization of a free-standing bulk polycrystalline GaN layer
    Samsudin, M. E. A.
    Taib, M. Ikram Md
    Alias, E.
    Waheeda, S. N.
    Ariff, A.
    Ahmad, M. A.
    Zainal, N.
    JOURNAL OF ALLOYS AND COMPOUNDS, 2018, 769 : 161 - 166
  • [49] Energy loss spectroscopy of epitaxial versus free-standing multilayer graphene
    Roslyak, O.
    Gumbs, Godfrey
    Huang, Danhong
    PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2012, 44 (09): : 1874 - 1884
  • [50] Characterization of 3C-SiC epitaxial layers on TiC(111) by Raman scattering
    Harima, Hiroshi
    Nakashima, Shin-ichi
    Carulli, John M.
    Beetz Jr., Charles P.
    Yoo, Woo S.
    Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1997, 36 (9 A): : 5525 - 5531