共 50 条
- [1] Fabrication of polycrystalline 3C-SiC microstructures [J]. EDM 2007: 8TH INTERNATIONAL WORKSHOP AND TUTORIALS ON ELECTRON DEVICES AND MATERIALS, 2007, : 25 - 26
- [3] Single Crystal and Polycrystalline 3C-SiC for MEMS Applications [J]. SILICON CARBIDE AND RELATED MATERIALS 2008, 2009, 615-617 : 625 - 628
- [6] MECHANICAL-PROPERTIES OF POLYCRYSTALLINE 3C-SIC DEPOSITS [J]. INORGANIC MATERIALS, 1995, 31 (09) : 1101 - 1104
- [8] Optical characteristics of polycrystalline 3C-SiC for harsh environments [J]. EDM 2007: 8TH INTERNATIONAL WORKSHOP AND TUTORIALS ON ELECTRON DEVICES AND MATERIALS, 2007, : 34 - 36
- [9] Electrical characteristics of polycrystalline 3C-SiC thin films [J]. EDM 2007: 8TH INTERNATIONAL WORKSHOP AND TUTORIALS ON ELECTRON DEVICES AND MATERIALS, 2007, : 32 - 33
- [10] Infrared optical investigation of 3C-SiC on Si [J]. PROCEEDINGS OF THE 25TH INTERNATIONAL CONFERENCE ON THE PHYSICS OF SEMICONDUCTORS, PTS I AND II, 2001, 87 : 1559 - 1560