From the implementation to the characterisation and assembling of microfabricated optical alcali vapor cell for mems atomic clocks

被引：0

作者：

Nieradko, L. ^{[1
]}

Gorecki, C. ^{[1
]}

Dziuban, J. ^{[1
,2
]}

Douahi, A. ^{[1
]}

Giordano, V. ^{[1
]}

Beugnot, J. C. ^{[1
]}

Guerandel, S. ^{[3
]}

Moraja, M. ^{[4
]}

机构：

[1] Univ Franche Comte, CNRS, FEMTO ST, UMR 6174, F-25030 Besancon, France

[2] Wroclaw Univ Technol, Wroclaw, Poland

[3] SYRTE UMR CNRS 8630, Paris, France

[4] SAES Getters, Milan, Italy

来源：

TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2007年

关键词：

atomic clock; wafer bonding; MEMS/MOEMS; coherent population trapping;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We describe the fabrication of miniature alkali atom vapor cells using silicon micromachining and anodic bonding. Such cells consist of cavities etched in silicon, with internal volumes of few mm(3). Original technique for introducing cesium into the cells is described; based on local heating of alkali dispenser. Cesium absorption and coherent population trapping resonances were measured in the cells.

引用

页数：2

共 50 条

[41] A REFLECTION TYPE VAPOR CELL BASED ON LOCAL ANODIC BONDING OF 45° MIRRORS FOR MICRO ATOMIC CLOCKS
Nishino, Hitoshi
Toda, Masaya
Yano, Yuichiro
Kajita, Masatoshi
Ido, Tetsuya
Hara, Motoaki
Ono, Takahito
2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019, : 1530 - 1532
[42] Microfabricated Atomic Vapor Cells with Multi-Optical Channels Based on an Innovative Inner-Sidewall Molding Process
Yu, Mingzhi
Chen, Yao
Wang, Yongliang
Han, Xiangguang
Luo, Guoxi
Zhao, Libo
Wang, Yanbin
Ma, Yintao
Lu, Shun
Yang, Ping
Lin, Qijing
Wang, Kaifei
Jiang, Zhuangde
ENGINEERING, 2024, 35 : 46 - 55
[43] New bounds on dark matter coupling from a global network of optical atomic clocks
Wcislo, P.
Ablewski, P.
Beloy, K.
Bilicki, S.
Bober, M.
Brown, R.
Fasano, R.
Ciurylo, R.
Hachisu, H.
Ido, T.
Lodewyck, J.
Ludlow, A.
McGrew, W.
Morzynski, P.
Nicolodi, D.
Schioppo, M.
Sekido, M.
Le Targat, R.
Wolf, P.
Zhang, X.
Zjawin, B.
Zawada, M.
SCIENCE ADVANCES, 2018, 4 (12):
[44] Low-temperature indium-bonded alkali vapor cell for chip-scale atomic clocks
Straessle, R.
Pellaton, M.
Affolderbach, C.
Petremand, Y.
Briand, D.
Mileti, G.
de Rooij, N. F.
JOURNAL OF APPLIED PHYSICS, 2013, 113 (06)
[45] Reflection-type vapor cell for micro atomic clocks using local anodic bonding of 45° mirrors
Nishino, Hitoshi
Yano, Yuichiro
Hara, Motoaki
Toda, Masaya
Kajita, Masatoshi
Ido, Tetsuya
Ono, Takahito
OPTICS LETTERS, 2021, 46 (10) : 2272 - 2275
[46] Alkali Vapor MEMS Cells Technology toward High-Vacuum Self-Pumping MEMS Cell for Atomic Spectroscopy
Knapkiewicz, Pawel
MICROMACHINES, 2018, 9 (08):
[47] More accurate atomic clocks may be enabled by optical frequency combs from femtosecond lasers
不详
MRS BULLETIN, 2001, 26 (10) : 756 - 756
[48] More Accurate Atomic Clocks May Be Enabled by Optical Frequency Combs from Femtosecond Lasers
MRS Bulletin, 2001, 26 : 756 - 756
[49] Influence of Laser Sources with Different Spectral Properties on the Performance of Vapor Cell Atomic Clocks Based on lin∥lin CPT
Breschi, Evelina
Kazakov, George
Lammegger, Roland
Matisov, Boris
Windholz, Laurentius
Mileti, Gaetano
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2009, 56 (05) : 926 - 930
[50] Self-generating magnetometer with laser pumping employment in "end resonance" wall coated vapor cell atomic clocks
Baranov, A. A.
Ermak, S. V.
Smolin, R. V.
Semenov, V. V.
8TH SYMPOSIUM ON FREQUENCY STANDARDS AND METROLOGY 2015, 2016, 723

← 1 2 3 4 5 →